Abstract: This paper uses the logistic curve model to build the development model of high-tech industry, and combines the measurement of high-tech industry's growth index to judge the five development stages of high-tech industry in the Yangtze River Delta. The boundary conditions from the initial stage to the growth stage and from the growth stage to the mature stage are determined. The results show that in recent 18 years the development of high-tech industry in the Yangtze River Delta could be divided into three stages, which are the fluctuation stage, the decline stage and the stable rising stage. Recently, the electronic computer and office equipment manufacturing industry has entered the late growth stage, and all the other industries, including the medicine manufacturing industry, the electronic and communication equipment manufacturing industry, medical equipment and instrumentation manufacturing industry, are in the early growth stage. This paper proposes corresponding countermeasures and suggestions according to the analysis results. To strengthen technological innovation ability, to increase financial support, to build a good regional environment and to expand market demand are efficient ways to realize the sustainable growth of high-tech industry in the Yangtze River Delta.